# Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/recurrent-feature-incorporated-convolutional-neural-network-for-virtual/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Ki Bum Lee,Chang Ouk Kim |
| Citations | 71 |
| DOI | 10.1007/s10845-018-1437-4 |
| Fields | Engineering |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2884425876 |
| Type | article |
| Year | 2018 |

## Paper authors

- [Chang Ouk Kim](https://scholariq.org/researchers/chang-ouk-kim/)

## Paper journal

- [Journal of Intelligent Manufacturing](https://scholariq.org/journals/journal-of-intelligent-manufacturing/)

## Paper primary topic

- [Advanced Surface Polishing Techniques](https://scholariq.org/topics/advanced-surface-polishing-techniques/)

## Paper topics

- [Advanced Surface Polishing Techniques](https://scholariq.org/topics/advanced-surface-polishing-techniques/)
- [Advanced Measurement and Metrology Techniques](https://scholariq.org/topics/advanced-measurement-and-metrology-techniques/)
- [Advanced machining processes and optimization](https://scholariq.org/topics/advanced-machining-processes-and-optimization/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.