# Residual stresses in titanium nitride thin films deposited by direct current and pulsed direct current unbalanced magnetron sputtering

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/residual-stresses-in-titanium-nitride-thin-films-deposited-by-direct-current-and/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Marjorie Benegra,Diego G. Lamas,M. Rapp,N. Míngolo,A.O. Kunrath,Roberto Martins de Souza |
| Citations | 70 |
| DOI | 10.1016/j.tsf.2005.08.214 |
| Fields | Engineering,Materials Science |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W1996255435 |
| Type | article |
| Year | 2005 |

## Paper authors

- [Roberto Martins de Souza](https://scholariq.org/researchers/roberto-martins-de-souza/)

## Paper primary topic

- [Metal and Thin Film Mechanics](https://scholariq.org/topics/metal-and-thin-film-mechanics/)

## Paper topics

- [Metal and Thin Film Mechanics](https://scholariq.org/topics/metal-and-thin-film-mechanics/)
- [Diamond and Carbon-based Materials Research](https://scholariq.org/topics/diamond-and-carbon-based-materials-research/)
- [Ion-surface interactions and analysis](https://scholariq.org/topics/ion-surface-interactions-and-analysis/)

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