# Review of Wafer Surface Defect Detection Methods

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/review-of-wafer-surface-defect-detection-methods/

## Facts

| Field | Value |
| --- | --- |
| Author Names | MA Jian-hong,Tao Zhang,Cong Yang,Yangjie Cao,Lipeng Xie,Hui Tian,Xuexiang Li |
| Citations | 74 |
| DOI | 10.3390/electronics12081787 |
| Fields | Engineering |
| Open Access | true |
| OA Status | gold |
| OA URL | https://www.mdpi.com/2079-9292/12/8/1787/pdf?version=1681122460 |
| OpenAlex ID | https://openalex.org/W4362734521 |
| Type | article |
| Year | 2023 |

## Paper authors

- [Yangjie Cao](https://scholariq.org/researchers/yangjie-cao/)

## Paper journal

- [Electronics](https://scholariq.org/journals/electronics/)

## Paper primary topic

- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)

## Paper topics

- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)
- [Surface Roughness and Optical Measurements](https://scholariq.org/topics/surface-roughness-and-optical-measurements/)
- [Manufacturing Process and Optimization](https://scholariq.org/topics/manufacturing-process-and-optimization/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.