# Silica sputtering as a novel collective stationary phase deposition for microelectromechanical system gas chromatography column: Feasibility and first separations

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/silica-sputtering-as-a-novel-collective-stationary-phase-deposition-for/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Jérôme Vial,Didier Thiébaut,Frédéric Marty,Pierre Guibal,R. Haudebourg,Kinda Nachef,K. Danaie,Bertrand Bourlon |
| Citations | 58 |
| DOI | 10.1016/j.chroma.2010.12.035 |
| Fields | Engineering |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2003544711 |
| PMID | 21208620 |
| Type | article |
| Year | 2010 |

## Paper authors

- [Jérôme Vial](https://scholariq.org/researchers/jerome-vial/)

## Paper primary topic

- [Microfluidic and Capillary Electrophoresis Applications](https://scholariq.org/topics/microfluidic-and-capillary-electrophoresis-applications/)

## Paper topics

- [Microfluidic and Capillary Electrophoresis Applications](https://scholariq.org/topics/microfluidic-and-capillary-electrophoresis-applications/)
- [Advanced MEMS and NEMS Technologies](https://scholariq.org/topics/advanced-mems-and-nems-technologies/)
- [Microfluidic and Bio-sensing Technologies](https://scholariq.org/topics/microfluidic-and-bio-sensing-technologies/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.