# Surface Free Energy Model of Silicon Anisotropic Etching

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/surface-free-energy-model-of-silicon-anisotropic-etching/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Peter J. Hesketh,Chishein Ju,Sanjay Gowda,Elmer S. Zanoria,S. Danyluk |
| Citations | 109 |
| DOI | 10.1149/1.2056201 |
| Fields | Engineering |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2137840087 |
| Type | article |
| Year | 1993 |

## Paper authors

- [S. Danyluk](https://scholariq.org/researchers/s-danyluk/)

## Paper primary topic

- [Advanced MEMS and NEMS Technologies](https://scholariq.org/topics/advanced-mems-and-nems-technologies/)

## Paper topics

- [Advanced MEMS and NEMS Technologies](https://scholariq.org/topics/advanced-mems-and-nems-technologies/)
- [Photonic and Optical Devices](https://scholariq.org/topics/photonic-and-optical-devices/)
- [Nanowire Synthesis and Applications](https://scholariq.org/topics/nanowire-synthesis-and-applications/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.