# The hetero-epitaxial SiCN/Si MSM photodetector for high-temperature deep-UV detecting applications

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/the-hetero-epitaxial-sicn-si-msm-photodetector-for-high-temperature-deep-uv/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Wen-Rong Chang,Yean-Kuen Fang,S.F. Ting,Yong-Shiuan Tsair,Cheng-Nan Chang,Chun‐Yu Lin,Shih‐Fang Chen |
| Citations | 78 |
| DOI | 10.1109/led.2003.816577 |
| Fields | Materials Science,Physics and Astronomy |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2139440948 |
| Type | article |
| Year | 2003 |

## Paper authors

- [Shih‐Fang Chen](https://scholariq.org/researchers/shih-fang-chen/)

## Paper primary topic

- [Ga2O3 and related materials](https://scholariq.org/topics/ga2o3-and-related-materials/)

## Paper topics

- [Ga2O3 and related materials](https://scholariq.org/topics/ga2o3-and-related-materials/)
- [GaN-based semiconductor devices and materials](https://scholariq.org/topics/gan-based-semiconductor-devices-and-materials/)
- [ZnO doping and properties](https://scholariq.org/topics/zno-doping-and-properties/)

---
Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.