# The negative capacitance effect on the C-V measurement of ultra thin gate dielectrics induced by the stray capacitance of the measurement system

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/the-negative-capacitance-effect-on-the-c-v-measurement-of-ultra-thin-gate/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Yukari Okawa,H. Norimatsu,Hirofumi Suto,M. Takayanagi |
| Citations | 26 |
| DOI | 10.1109/icmts.2003.1197461 |
| Fields | Engineering,Physics and Astronomy |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2127413499 |
| Type | conference-paper |
| Year | 2003 |

## Paper authors

- [Yukari Okawa](https://scholariq.org/researchers/yukari-okawa/)

## Paper primary topic

- [Semiconductor materials and devices](https://scholariq.org/topics/semiconductor-materials-and-devices/)

## Paper topics

- [Semiconductor materials and devices](https://scholariq.org/topics/semiconductor-materials-and-devices/)
- [Integrated Circuits and Semiconductor Failure Analysis](https://scholariq.org/topics/integrated-circuits-and-semiconductor-failure-analysis/)
- [Semiconductor materials and interfaces](https://scholariq.org/topics/semiconductor-materials-and-interfaces/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.