# The property of plasma-polymerized fluorocarbon film in relation to CH4/C4F8 ratio and substrate temperature

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/the-property-of-plasma-polymerized-fluorocarbon-film-in-relation-to-ch4-c4f8/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Yoshinori Matsumoto,Mákoto Ishida |
| Citations | 70 |
| DOI | 10.1016/s0924-4247(99)00396-9 |
| Fields | Engineering,Materials Science |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2046597982 |
| Type | article |
| Year | 2000 |

## Paper authors

- [Yoshinori Matsumoto](https://scholariq.org/researchers/yoshinori-matsumoto/)

## Paper primary topic

- [Advanced Sensor and Energy Harvesting Materials](https://scholariq.org/topics/advanced-sensor-and-energy-harvesting-materials/)

## Paper topics

- [Advanced Sensor and Energy Harvesting Materials](https://scholariq.org/topics/advanced-sensor-and-energy-harvesting-materials/)
- [Surface Modification and Superhydrophobicity](https://scholariq.org/topics/surface-modification-and-superhydrophobicity/)
- [Diamond and Carbon-based Materials Research](https://scholariq.org/topics/diamond-and-carbon-based-materials-research/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.