# Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/thermal-and-plasma-enhanced-atomic-layer-deposition-of-sio2-using-commercial/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Matti Putkonen,Markus Bosund,Oili Ylivaara,Riikka L. Puurunen,Lauri Kilpi,Helena Ronkainen,Sakari Sintonen,Saima Ali,Harri Lipsanen,Xuwen Liu,Eero Haimi,Simo‐Pekka Hannula,Timo Sajavaara,Iain Buchanan,Eugene J. Karwacki,Mika Vähä‐Nissi |
| Citations | 78 |
| DOI | 10.1016/j.tsf.2014.02.087 |
| Fields | Engineering,Materials Science |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2010251245 |
| Type | article |
| Year | 2014 |

## Paper authors

- [Lauri Kilpi](https://scholariq.org/researchers/lauri-kilpi/)

## Paper primary topic

- [Semiconductor materials and devices](https://scholariq.org/topics/semiconductor-materials-and-devices/)

## Paper topics

- [Semiconductor materials and devices](https://scholariq.org/topics/semiconductor-materials-and-devices/)
- [Electronic and Structural Properties of Oxides](https://scholariq.org/topics/electronic-and-structural-properties-of-oxides/)
- [Silicon Nanostructures and Photoluminescence](https://scholariq.org/topics/silicon-nanostructures-and-photoluminescence/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.