# Three-axis SOI capacitive accelerometer with PLL C–V converter

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/three-axis-soi-capacitive-accelerometer-with-pll-c-v-converter/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Yoshinori Matsumoto,M. Nishimura,Miho Matsuura,Masatoshi Ishida |
| Citations | 61 |
| DOI | 10.1016/s0924-4247(98)00295-7 |
| Fields | Engineering |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2093328453 |
| Type | article |
| Year | 1999 |

## Paper authors

- [Yoshinori Matsumoto](https://scholariq.org/researchers/yoshinori-matsumoto/)

## Paper primary topic

- [Advanced MEMS and NEMS Technologies](https://scholariq.org/topics/advanced-mems-and-nems-technologies/)

## Paper topics

- [Advanced MEMS and NEMS Technologies](https://scholariq.org/topics/advanced-mems-and-nems-technologies/)
- [Acoustic Wave Resonator Technologies](https://scholariq.org/topics/acoustic-wave-resonator-technologies/)
- [Advanced Surface Polishing Techniques](https://scholariq.org/topics/advanced-surface-polishing-techniques/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.