# Towards Bayesian network methodology for predicting the equipment health factor of complex semiconductor systems

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/towards-bayesian-network-methodology-for-predicting-the-equipment-health-factor/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Mohammed Farouk Bouaziz,Éric Zamaï,F. Duvivier |
| Citations | 30 |
| DOI | 10.1080/00207543.2013.775525 |
| Fields | Decision Sciences,Engineering |
| Open Access | true |
| OA Status | green |
| OA URL | http://www.theses.fr/2012GRENT109/document |
| OpenAlex ID | https://openalex.org/W2130534563 |
| Type | article |
| Year | 2013 |

## Paper authors

- [Éric Zamaï](https://scholariq.org/researchers/eric-zamai/)

## Paper journal

- [International Journal of Production Research](https://scholariq.org/journals/international-journal-of-production-research/)

## Paper primary topic

- [Fault Detection and Control Systems](https://scholariq.org/topics/fault-detection-and-control-systems/)

## Paper topics

- [Fault Detection and Control Systems](https://scholariq.org/topics/fault-detection-and-control-systems/)
- [Advanced Statistical Process Monitoring](https://scholariq.org/topics/advanced-statistical-process-monitoring/)
- [Risk and Safety Analysis](https://scholariq.org/topics/risk-and-safety-analysis/)

---
Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.