# Understanding Surface Treatment and ALD AlOx Thickness Induced Surface Passivation Quality of c-Si Cz Wafers

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/understanding-surface-treatment-and-ald-alox-thickness-induced-surface/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Gurleen Kaur,Neeraj Dwivedi,Xin Zheng,Baochen Liao,Ling Z. Peng,Aaron J. Danner,Rolf Stangl,Charanjit S. Bhatia |
| Citations | 43 |
| DOI | 10.1109/jphotov.2017.2717040 |
| Fields | Engineering,Physics and Astronomy |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2738447778 |
| Type | article |
| Year | 2017 |

## Paper authors

- [Xin Zheng](https://scholariq.org/researchers/xin-zheng-2/)

## Paper primary topic

- [Engineering](https://scholariq.org/topics/engineering/)

## Paper topics

- [Semiconductor materials and interfaces](https://scholariq.org/topics/semiconductor-materials-and-interfaces/)
- [Semiconductor materials and devices](https://scholariq.org/topics/semiconductor-materials-and-devices/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.