# Virtual metrology for semiconductor manufacturing: Focus on transfer learning

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/virtual-metrology-for-semiconductor-manufacturing-focus-on-transfer-learning/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Rebecca Clain,Valeria Borodin,Michel Juge,Agnès Roussy |
| Citations | 13 |
| DOI | 10.1109/case49439.2021.9551567 |
| Fields | Computer Science,Engineering |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W3203047944 |
| Type | conference-paper |
| Year | 2021 |

## Paper authors

- [Michel Juge](https://scholariq.org/researchers/michel-juge/)
- [Agnès Roussy](https://scholariq.org/researchers/agnes-roussy/)

## Paper primary topic

- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)

## Paper topics

- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)
- [Image Processing Techniques and Applications](https://scholariq.org/topics/image-processing-techniques-and-applications/)
- [Domain Adaptation and Few-Shot Learning](https://scholariq.org/topics/domain-adaptation-and-few-shot-learning/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.