# Virtual Metrology Modeling for CVD Film Thickness

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/virtual-metrology-modeling-for-cvd-film-thickness/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Jérôme Besnard,Dietmar Gleispach,Hervé Gris,Ariane Ferreira,Agnès Roussy,Christelle Kernaflen,Günter Hayderer |
| Citations | 28 |
| DOI | 10.5923/j.control.20120203.02 |
| Fields | Engineering |
| Open Access | true |
| OA Status | hybrid |
| OA URL | https://doi.org/10.5923/j.control.20120203.02 |
| OpenAlex ID | https://openalex.org/W2000264042 |
| Type | article |
| Year | 2012 |

## Paper authors

- [Agnès Roussy](https://scholariq.org/researchers/agnes-roussy/)

## Paper journal

- [International Journal of Control Science and Engineering](https://scholariq.org/journals/international-journal-of-control-science-and-engineering/)

## Paper primary topic

- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)

## Paper topics

- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)
- [Fault Detection and Control Systems](https://scholariq.org/topics/fault-detection-and-control-systems/)
- [Image Processing Techniques and Applications](https://scholariq.org/topics/image-processing-techniques-and-applications/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.