# Virtual metrology models for predicting avera PECVD oxide film thickne

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/virtual-metrology-models-for-predicting-avera-pecvd-oxide-film-thickne/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Ariane Ferreira,Agnès Roussy,Christelle Kernaflen,Dietmar Gleispach,Günter Hayderer,Hervé Gris,Jérôme Besnard |
| Citations | 10 |
| DOI | 10.1109/asmc.2011.5898187 |
| Fields | Engineering |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2131990540 |
| Type | conference-paper |
| Year | 2011 |

## Paper authors

- [Agnès Roussy](https://scholariq.org/researchers/agnes-roussy/)

## Paper primary topic

- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)

## Paper topics

- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)
- [Advanced Surface Polishing Techniques](https://scholariq.org/topics/advanced-surface-polishing-techniques/)
- [Fault Detection and Control Systems](https://scholariq.org/topics/fault-detection-and-control-systems/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.