# Virtual Metrology models for predicting physical measurement in semiconductor manufacturing

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/virtual-metrology-models-for-predicting-physical-measurement-in-semiconductor/

## Facts

| Field | Value |
| --- | --- |
| Author Names | A. Ferreira,Agnès Roussy,Lamine Condé |
| Citations | 23 |
| DOI | 10.1109/asmc.2009.5155973 |
| Fields | Decision Sciences,Engineering |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2151505334 |
| Type | conference-paper |
| Year | 2009 |

## Paper authors

- [Agnès Roussy](https://scholariq.org/researchers/agnes-roussy/)

## Paper primary topic

- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)

## Paper topics

- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)
- [Manufacturing Process and Optimization](https://scholariq.org/topics/manufacturing-process-and-optimization/)
- [Advanced Statistical Process Monitoring](https://scholariq.org/topics/advanced-statistical-process-monitoring/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.