# X-ray diffraction evidence for epitaxial microcrystallinity in thermally oxidized SiO<sub>2</sub>thin films on the Si(001) surface

**Type:** Papers  
**Canonical URL:** https://scholariq.org/papers/x-ray-diffraction-evidence-for-epitaxial-microcrystallinity-in-thermally/

## Facts

| Field | Value |
| --- | --- |
| Author Names | Isao Takahashi,Takayoshi Shimura,J. Harada |
| Citations | 52 |
| DOI | 10.1088/0953-8984/5/36/007 |
| Fields | Engineering,Materials Science |
| Open Access | false |
| OA Status | closed |
| OpenAlex ID | https://openalex.org/W2070622136 |
| Type | article |
| Year | 1993 |

## Paper authors

- [Isao Takahashi](https://scholariq.org/researchers/isao-takahashi/)

## Paper primary topic

- [Semiconductor materials and devices](https://scholariq.org/topics/semiconductor-materials-and-devices/)

## Paper topics

- [Semiconductor materials and devices](https://scholariq.org/topics/semiconductor-materials-and-devices/)
- [Silicon Nanostructures and Photoluminescence](https://scholariq.org/topics/silicon-nanostructures-and-photoluminescence/)
- [Glass properties and applications](https://scholariq.org/topics/glass-properties-and-applications/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.