# Agnès Roussy

**Type:** Researchers  
**Canonical URL:** https://scholariq.org/researchers/agnes-roussy/

## Facts

| Field | Value |
| --- | --- |
| Citations | 311 |
| Field | Industrial Vision Systems and Defect Detection |
| h-index | 9 |
| i10-index | 9 |
| Last Known Institution | Mines Saint-Étienne |
| OpenAlex ID | https://openalex.org/A5108513559 |
| Works | 52 |

## Researcher papers

- [An interpretable unsupervised Bayesian network model for fault detection and diagnosis](https://scholariq.org/papers/an-interpretable-unsupervised-bayesian-network-model-for-fault-detection-and/)
- [NbN multilayer technology on R-plane sapphire](https://scholariq.org/papers/nbn-multilayer-technology-on-r-plane-sapphire/)
- [A Structure Data-Driven Framework for Virtual Metrology Modeling](https://scholariq.org/papers/a-structure-data-driven-framework-for-virtual-metrology-modeling/)
- [Virtual Metrology Modeling for CVD Film Thickness](https://scholariq.org/papers/virtual-metrology-modeling-for-cvd-film-thickness/)
- [Virtual Metrology models for predicting physical measurement in semiconductor manufacturing](https://scholariq.org/papers/virtual-metrology-models-for-predicting-physical-measurement-in-semiconductor/)
- [A physics-informed Run-to-Run control framework for semiconductor manufacturing](https://scholariq.org/papers/a-physics-informed-run-to-run-control-framework-for-semiconductor-manufacturing/)
- [Tool Condition Diagnosis With a Recipe-Independent Hierarchical Monitoring Scheme](https://scholariq.org/papers/tool-condition-diagnosis-with-a-recipe-independent-hierarchical-monitoring/)
- [Virtual metrology for semiconductor manufacturing: Focus on transfer learning](https://scholariq.org/papers/virtual-metrology-for-semiconductor-manufacturing-focus-on-transfer-learning/)
- [Virtual metrology models for predicting avera PECVD oxide film thickne](https://scholariq.org/papers/virtual-metrology-models-for-predicting-avera-pecvd-oxide-film-thickne/)
- [On-chip high-frequency diagnostic of RSFQ logic cells](https://scholariq.org/papers/on-chip-high-frequency-diagnostic-of-rsfq-logic-cells/)

## Researcher topics

- [Industrial Vision Systems and Defect Detection](https://scholariq.org/topics/industrial-vision-systems-and-defect-detection/)
- [Advanced Surface Polishing Techniques](https://scholariq.org/topics/advanced-surface-polishing-techniques/)
- [Fault Detection and Control Systems](https://scholariq.org/topics/fault-detection-and-control-systems/)
- [Semiconductor materials and devices](https://scholariq.org/topics/semiconductor-materials-and-devices/)
- [Advanced Statistical Process Monitoring](https://scholariq.org/topics/advanced-statistical-process-monitoring/)

## Researcher university

- [Mines Saint-Étienne](https://scholariq.org/institutions/mines-saint-etienne/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.