# Advanced MEMS and NEMS Technologies

**Type:** Topics  
**Canonical URL:** https://scholariq.org/topics/advanced-mems-and-nems-technologies-2/

## Facts

| Field | Value |
| --- | --- |
| Citations | 669,488 |
| Description | This cluster of papers covers a wide range of topics related to Microelectromechanical Systems (MEMS), including silicon properties, microfabrication techniques, resonators, actuators, sensors, reliability issues, RF switches, nanomechanical testing, and thermal behavior. |
| Domain | Physical Sciences |
| Field | Engineering |
| OpenAlex ID | https://openalex.org/T10369 |
| Works | 69,375 |

## Topic researchers

Showing 12 of 20.

- [Zhong Lin Wang](https://scholariq.org/researchers/zhong-lin-wang/)
- [Hongjie Dai](https://scholariq.org/researchers/hongjie-dai-2/)
- [D. Brown](https://scholariq.org/researchers/d-brown/)
- [Peidong Yang](https://scholariq.org/researchers/peidong-yang/)
- [James Hone](https://scholariq.org/researchers/james-hone/)
- [B. Allen](https://scholariq.org/researchers/b-allen/)
- [O. Jinnouchi](https://scholariq.org/researchers/o-jinnouchi/)
- [A. Korytov](https://scholariq.org/researchers/a-korytov/)
- [I. Vila](https://scholariq.org/researchers/i-vila/)
- [Xiang Zhang](https://scholariq.org/researchers/xiang-zhang/)
- [M. Mikeštíková](https://scholariq.org/researchers/m-mikestikova/)
- [J. E. Brau](https://scholariq.org/researchers/j-e-brau/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.