# Advanced MEMS and NEMS Technologies

**Type:** Topics  
**Canonical URL:** https://scholariq.org/topics/advanced-mems-and-nems-technologies/

## Facts

| Field | Value |
| --- | --- |
| Description | This cluster of papers covers a wide range of topics related to Microelectromechanical Systems (MEMS), including silicon properties, microfabrication techniques, resonators, actuators, sensors, reliability issues, RF switches, nanomechanical testing, and thermal behavior. |
| Domain | Physical Sciences |
| Field | Engineering |
| OpenAlex ID | t10369 |
| Works | 34 |

## Topic papers all

Showing 15 of 34.

- [Optically Levitated Nanodumbbell Torsion Balance and GHz Nanomechanical Rotor](https://scholariq.org/papers/optically-levitated-nanodumbbell-torsion-balance-and-ghz-nanomechanical-rotor/)
- [Nonlinear dynamics of nanomechanical beam resonators: improving the performance of NEMS-based sensors](https://scholariq.org/papers/nonlinear-dynamics-of-nanomechanical-beam-resonators-improving-the-performance/)
- [Micro manipulation based on micro physics-strategy based on attractive force reduction and stress measurement](https://scholariq.org/papers/micro-manipulation-based-on-micro-physics-strategy-based-on-attractive-force/)
- [The ‘size effect’ on the stress–strain, fatigue and fracture properties of thin metallic foils](https://scholariq.org/papers/the-size-effect-on-the-stress-strain-fatigue-and-fracture-properties-of-thin/)
- [Design and fabrication of a six-dimensional wrist force/torque sensor based on E-type membranes compared to cross beams](https://scholariq.org/papers/design-and-fabrication-of-a-six-dimensional-wrist-force-torque-sensor-based-on-e/)
- [Design and optimization of a novel six-axis force/torque sensor for space robot](https://scholariq.org/papers/design-and-optimization-of-a-novel-six-axis-force-torque-sensor-for-space-robot/)
- [A High-Sensitivity Tactile Sensor Array Based on Fiber Bragg Grating Sensing for Tissue Palpation in Minimally Invasive Surgery](https://scholariq.org/papers/a-high-sensitivity-tactile-sensor-array-based-on-fiber-bragg-grating-sensing-for/)
- [Efficient charge recovery method for driving piezoelectric actuators with quasi-square waves](https://scholariq.org/papers/efficient-charge-recovery-method-for-driving-piezoelectric-actuators-with-quasi/)
- [Surface Free Energy Model of Silicon Anisotropic Etching](https://scholariq.org/papers/surface-free-energy-model-of-silicon-anisotropic-etching/)
- [Modeling and Evaluation of Low-Cost Force Sensors](https://scholariq.org/papers/modeling-and-evaluation-of-low-cost-force-sensors/)
- [Integration of a Miniaturised Triaxial Force Sensor in a Minimally Invasive Surgical Tool](https://scholariq.org/papers/integration-of-a-miniaturised-triaxial-force-sensor-in-a-minimally-invasive/)
- [MEMS Oscillators for High Volume Commercial Applications](https://scholariq.org/papers/mems-oscillators-for-high-volume-commercial-applications/)
- [Development and analysis of a bridge-lever-type displacement amplifier based on hybrid flexure hinges](https://scholariq.org/papers/development-and-analysis-of-a-bridge-lever-type-displacement-amplifier-based-on/)
- [Cascaded filter deterministic lateral displacement microchips for isolation and molecular analysis of circulating tumor cells and fusion cells](https://scholariq.org/papers/cascaded-filter-deterministic-lateral-displacement-microchips-for-isolation-and/)
- [Random Error Reduction Algorithms for MEMS Inertial Sensor Accuracy Improvement—A Review](https://scholariq.org/papers/random-error-reduction-algorithms-for-mems-inertial-sensor-accuracy-improvement/)

## Topic primary papers

- [Nonlinear dynamics of nanomechanical beam resonators: improving the performance of NEMS-based sensors](https://scholariq.org/papers/nonlinear-dynamics-of-nanomechanical-beam-resonators-improving-the-performance/)
- [Micro manipulation based on micro physics-strategy based on attractive force reduction and stress measurement](https://scholariq.org/papers/micro-manipulation-based-on-micro-physics-strategy-based-on-attractive-force/)
- [Surface Free Energy Model of Silicon Anisotropic Etching](https://scholariq.org/papers/surface-free-energy-model-of-silicon-anisotropic-etching/)
- [Modeling and Evaluation of Low-Cost Force Sensors](https://scholariq.org/papers/modeling-and-evaluation-of-low-cost-force-sensors/)
- [MEMS Oscillators for High Volume Commercial Applications](https://scholariq.org/papers/mems-oscillators-for-high-volume-commercial-applications/)
- [Multi-Dimensional MEMS/Micro Sensor for Force and Moment Sensing: A Review](https://scholariq.org/papers/multi-dimensional-mems-micro-sensor-for-force-and-moment-sensing-a-review/)
- [A Microgripper With a Large Magnification Ratio and High Structural Stiffness Based on a Flexure-Enabled Mechanism](https://scholariq.org/papers/a-microgripper-with-a-large-magnification-ratio-and-high-structural-stiffness/)
- [Three-axis SOI capacitive accelerometer with PLL C–V converter](https://scholariq.org/papers/three-axis-soi-capacitive-accelerometer-with-pll-c-v-converter/)
- [Fabrication of Capacitive Micromachined Ultrasonic Transducer Arrays With Isolation Trenches Using Anodic Wafer Bonding](https://scholariq.org/papers/fabrication-of-capacitive-micromachined-ultrasonic-transducer-arrays-with/)
- [Triaxial MEMS Gyroscopes: A Review](https://scholariq.org/papers/triaxial-mems-gyroscopes-a-review/)
- [Design and Fabrication of a Novel Wheel-Ring Triaxial Gyroscope](https://scholariq.org/papers/design-and-fabrication-of-a-novel-wheel-ring-triaxial-gyroscope/)
- [Design, Fabrication, and Characterization of a Multicurved Surface Fusion Metal Resonant Gyroscope](https://scholariq.org/papers/design-fabrication-and-characterization-of-a-multicurved-surface-fusion-metal/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.