# Advanced Surface Polishing Techniques

**Type:** Topics  
**Canonical URL:** https://scholariq.org/topics/advanced-surface-polishing-techniques/

## Facts

| Field | Value |
| --- | --- |
| Description | This cluster of papers focuses on the techniques, mechanisms, and simulations related to chemical mechanical polishing (CMP) in the context of microelectronics manufacturing. It covers topics such as material removal mechanisms, molecular dynamics simulation, ultra-precision grinding, surface and subsurface damage, nanometric cutting, magnetorheological finishing, polishing slurry chemistry, and tool wear. |
| Domain | Physical Sciences |
| Field | Engineering |
| OpenAlex ID | t11301 |
| Works | 124 |

## Topic papers all

Showing 15 of 124.

- [Experimental evaluation of the lubrication performance of mixtures of castor oil with other vegetable oils in MQL grinding of nickel-based alloy](https://scholariq.org/papers/experimental-evaluation-of-the-lubrication-performance-of-mixtures-of-castor-oil/)
- [Shape Sensing Techniques for Continuum Robots in Minimally Invasive Surgery: A Survey](https://scholariq.org/papers/shape-sensing-techniques-for-continuum-robots-in-minimally-invasive-surgery-a/)
- [State Space Modeling of Sheet Metal Assembly for Dimensional Control](https://scholariq.org/papers/state-space-modeling-of-sheet-metal-assembly-for-dimensional-control/)
- [Modelling and analysis of micro scale milling considering size effect, micro cutter edge radius and minimum chip thickness](https://scholariq.org/papers/modelling-and-analysis-of-micro-scale-milling-considering-size-effect-micro/)
- [Stability of Interrupted Cutting by Temporal Finite Element Analysis](https://scholariq.org/papers/stability-of-interrupted-cutting-by-temporal-finite-element-analysis/)
- [Experimental evaluation of the lubrication properties of the wheel/workpiece interface in minimum quantity lubrication (MQL) grinding using different types of vegetable oils](https://scholariq.org/papers/experimental-evaluation-of-the-lubrication-properties-of-the-wheel-workpiece-2/)
- [Grinding temperature and energy ratio coefficient in MQL grinding of high-temperature nickel-base alloy by using different vegetable oils as base oil](https://scholariq.org/papers/grinding-temperature-and-energy-ratio-coefficient-in-mql-grinding-of-high/)
- [Experimental study on the effect of nanoparticle concentration on the lubricating property of nanofluids for MQL grinding of Ni-based alloy](https://scholariq.org/papers/experimental-study-on-the-effect-of-nanoparticle-concentration-on-the/)
- [Stability of up-milling and down-milling, part 1: alternative analytical methods](https://scholariq.org/papers/stability-of-up-milling-and-down-milling-part-1-alternative-analytical-methods/)
- [Curvature, Torsion, and Force Sensing in Continuum Robots Using Helically Wrapped FBG Sensors](https://scholariq.org/papers/curvature-torsion-and-force-sensing-in-continuum-robots-using-helically-wrapped/)
- [Advances in Large-Scale Metrology – Review and future trends](https://scholariq.org/papers/advances-in-large-scale-metrology-review-and-future-trends/)
- [Multiple chatter frequencies in milling processes](https://scholariq.org/papers/multiple-chatter-frequencies-in-milling-processes/)
- [Micro hot embossing of thermoplastic polymers: a review](https://scholariq.org/papers/micro-hot-embossing-of-thermoplastic-polymers-a-review/)
- [Influence of microstructure on the cutting behaviour of silicon](https://scholariq.org/papers/influence-of-microstructure-on-the-cutting-behaviour-of-silicon/)
- [A model for stresses, crack generation and fracture toughness calculation in scratched TiN-coated steel surfaces](https://scholariq.org/papers/a-model-for-stresses-crack-generation-and-fracture-toughness-calculation-in/)

## Topic primary papers

Showing 15 of 24.

- [Influence of microstructure on the cutting behaviour of silicon](https://scholariq.org/papers/influence-of-microstructure-on-the-cutting-behaviour-of-silicon/)
- [Some recent developments in mechanical activation and mechanosynthesis](https://scholariq.org/papers/some-recent-developments-in-mechanical-activation-and-mechanosynthesis/)
- [Contact Mechanics and Lubrication Hydrodynamics of Chemical Mechanical Polishing](https://scholariq.org/papers/contact-mechanics-and-lubrication-hydrodynamics-of-chemical-mechanical-polishing/)
- [Rapid characterization and modeling of pattern-dependent variation in chemical-mechanical polishing](https://scholariq.org/papers/rapid-characterization-and-modeling-of-pattern-dependent-variation-in-chemical/)
- [Micro machining glass with polycrystalline diamond tools shaped by micro electro discharge machining](https://scholariq.org/papers/micro-machining-glass-with-polycrystalline-diamond-tools-shaped-by-micro-electro/)
- [Influence of Colloidal Abrasive Size on Material Removal Rate and Surface Finish in SiO<sub>2</sub>Chemical Mechanical Polishing](https://scholariq.org/papers/influence-of-colloidal-abrasive-size-on-material-removal-rate-and-surface-finish/)
- [Interfacial Fluid Mechanics and Pressure Prediction in Chemical Mechanical Polishing](https://scholariq.org/papers/interfacial-fluid-mechanics-and-pressure-prediction-in-chemical-mechanical/)
- [A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow](https://scholariq.org/papers/a-novel-polishing-method-for-single-crystal-silicon-using-the-cavitation-rotary/)
- [Investigation of the optimal parameters for the surface finish of K9 optical glass using a soft abrasive rotary flow polishing process](https://scholariq.org/papers/investigation-of-the-optimal-parameters-for-the-surface-finish-of-k9-optical/)
- [Characterization of mechanical and thermal properties of thin Cu foils and wires](https://scholariq.org/papers/characterization-of-mechanical-and-thermal-properties-of-thin-cu-foils-and-wires/)
- [Robust manipulation of deformable objects by a simple PID feedback](https://scholariq.org/papers/robust-manipulation-of-deformable-objects-by-a-simple-pid-feedback/)
- [Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process](https://scholariq.org/papers/recurrent-feature-incorporated-convolutional-neural-network-for-virtual/)
- [A new apparatus for finishing large size/large batch silicon nitride (Si3N4) balls for hybrid bearing applications by magnetic float polishing (MFP)](https://scholariq.org/papers/a-new-apparatus-for-finishing-large-size-large-batch-silicon-nitride-si3n4-balls/)
- [An improved soft abrasive flow finishing method based on fluid collision theory](https://scholariq.org/papers/an-improved-soft-abrasive-flow-finishing-method-based-on-fluid-collision-theory/)
- [An adaptive framework for robotic polishing based on impedance control](https://scholariq.org/papers/an-adaptive-framework-for-robotic-polishing-based-on-impedance-control/)

---
Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.