# Plasma Diagnostics and Applications

**Type:** Topics  
**Canonical URL:** https://scholariq.org/topics/plasma-diagnostics-and-applications-2/

## Facts

| Field | Value |
| --- | --- |
| Citations | 903,855 |
| Description | This cluster of papers covers a wide range of topics related to plasma physics and its applications in the semiconductor industry, including plasma etching techniques, atomic layer etching, Hall thrusters for spacecraft propulsion, electron energy distribution function measurements, and ion-molecule collisions. It also explores the use of plasmas in electric propulsion for satellites and spacecraft. |
| Domain | Physical Sciences |
| Field | Engineering |
| OpenAlex ID | https://openalex.org/T10781 |
| Works | 981,590 |

## Topic researchers

Showing 12 of 20.

- [Matthias Mann](https://scholariq.org/researchers/matthias-mann/)
- [Donald G. Truhlar](https://scholariq.org/researchers/donald-g-truhlar/)
- [A. Ereditato](https://scholariq.org/researchers/a-ereditato/)
- [C. Meyer](https://scholariq.org/researchers/c-meyer/)
- [M. Felcini](https://scholariq.org/researchers/m-felcini/)
- [Francesco Mauri](https://scholariq.org/researchers/francesco-mauri/)
- [Richard N. Zare](https://scholariq.org/researchers/richard-n-zare/)
- [Shuji Nakamura](https://scholariq.org/researchers/shuji-nakamura/)
- [Jonathan Tennyson](https://scholariq.org/researchers/jonathan-tennyson/)
- [D. Cavalli](https://scholariq.org/researchers/d-cavalli/)
- [M. N. Rosenbluth](https://scholariq.org/researchers/m-n-rosenbluth/)
- [Steven P. DenBaars](https://scholariq.org/researchers/steven-p-denbaars/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.