# Semiconductor materials and devices

**Type:** Topics  
**Canonical URL:** https://scholariq.org/topics/semiconductor-materials-and-devices-2/

## Facts

| Field | Value |
| --- | --- |
| Citations | 2,641,143 |
| Description | This cluster of papers focuses on the advances in atomic layer deposition (ALD) technology, particularly in the context of high-k dielectrics, gate oxides, and semiconductor devices. It covers topics such as thin film growth, dielectric breakdown mechanisms, metal gate transistors, interface engineering, and the impact of negative bias temperature instability (NBTI) degradation on device performance. |
| Domain | Physical Sciences |
| Field | Engineering |
| OpenAlex ID | https://openalex.org/T10472 |
| Works | 191,894 |

## Topic researchers

Showing 12 of 20.

- [Zhong Lin Wang](https://scholariq.org/researchers/zhong-lin-wang/)
- [Georg Kresse](https://scholariq.org/researchers/georg-kresse/)
- [Kostya S. Novoselov](https://scholariq.org/researchers/kostya-s-novoselov/)
- [A. K. Geǐm](https://scholariq.org/researchers/a-k-geim/)
- [Kieron Burke](https://scholariq.org/researchers/kieron-burke/)
- [George M. Whitesides](https://scholariq.org/researchers/george-m-whitesides/)
- [Wei Huang](https://scholariq.org/researchers/wei-huang-5/)
- [Yi Cui](https://scholariq.org/researchers/yi-cui/)
- [Jens K. Nørskov](https://scholariq.org/researchers/jens-k-n-rskov/)
- [Kenji Watanabe](https://scholariq.org/researchers/kenji-watanabe/)
- [Rodney S. Ruoff](https://scholariq.org/researchers/rodney-s-ruoff/)
- [J. Furthmüller](https://scholariq.org/researchers/j-furthmuller/)

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Source: ScholarIQ — public research metadata, principally OpenAlex. See https://scholariq.org/sources/ for provenance and https://scholariq.org/methodology/ for what these figures mean.