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Mechanical properties of cubic boron nitride film on Si prepared by ECR plasma

PaperCitations, authors & open-access status

Mechanical properties of cubic boron nitride film on Si prepared by ECR plasma is a paper indexed in ScholarIQ from OpenAlex. ScholarIQ records 18 citations, 1993 year and closed oa status.

18
Citations
1993
Year
closed
OA Status

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