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Mechanical properties of cubic boron nitride film on Si prepared by ECR plasma
PaperCitations, authors & open-access status
Mechanical properties of cubic boron nitride film on Si prepared by ECR plasma is a paper indexed in ScholarIQ from OpenAlex.
How many citations does Mechanical properties of cubic boron nitride film on Si prepared by ECR plasma have?
ScholarIQcitation count
Mechanical properties of cubic boron nitride film on Si prepared by ECR plasma has 18 citations in the OpenAlex counts ScholarIQ stores.
When was Mechanical properties of cubic boron nitride film on Si prepared by ECR plasma published?
ScholarIQyear
Mechanical properties of cubic boron nitride film on Si prepared by ECR plasma has 1993 year in the ScholarIQ index.
What is the open-access status of Mechanical properties of cubic boron nitride film on Si prepared by ECR plasma?
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Mechanical properties of cubic boron nitride film on Si prepared by ECR plasma has closed oa status in the ScholarIQ index.
What is the DOI of Mechanical properties of cubic boron nitride film on Si prepared by ECR plasma?
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The DOI for Mechanical properties of cubic boron nitride film on Si prepared by ECR plasma is on the source record.
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The OpenAlex for Mechanical properties of cubic boron nitride film on Si prepared by ECR plasma is on the source record.