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Molecular dynamics study of pattern transfer in nanoimprint lithography

PaperCitations, authors & open-access status

Molecular dynamics study of pattern transfer in nanoimprint lithography is a paper indexed in ScholarIQ from OpenAlex. ScholarIQ records 52 citations, 2007 year and closed oa status.

52
Citations
2007
Year
closed
OA Status

Related on ScholarIQ

Kyung-Woong Kim
Author
Tribology Letters
Journal
Nanofabrication and Lithography Techniques
Topic
Nanofabrication and Lithography Techniques
Topic
Force Microscopy Techniques and Applications
Topic
Metal and Thin Film Mechanics
Topic
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