Residual stresses in titanium nitride thin films deposited by direct current and pulsed direct current unbalanced magnetron sputtering

Residual stresses in titanium nitride thin films deposited by direct current and pulsed direct current unbalanced magnetron sputtering is a paper indexed in ScholarIQ from OpenAlex.

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Residual stresses in titanium nitride thin films deposited by direct current and pulsed direct current unbalanced magnetron sputtering has 70 citations in the OpenAlex counts ScholarIQ stores.

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Residual stresses in titanium nitride thin films deposited by direct current and pulsed direct current unbalanced magnetron sputtering has 2005 year in the ScholarIQ index.

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