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Residual stresses in titanium nitride thin films deposited by direct current and pulsed direct current unbalanced magnetron sputtering
PaperCitations, authors & open-access status
Residual stresses in titanium nitride thin films deposited by direct current and pulsed direct current unbalanced magnetron sputtering is a paper indexed in ScholarIQ from OpenAlex. ScholarIQ records 70 citations, 2005 year and closed oa status.
70
Citations
2005
Year
closed
OA Status