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The property of plasma-polymerized fluorocarbon film in relation to CH4/C4F8 ratio and substrate temperature
PaperCitations, authors & open-access status
The property of plasma-polymerized fluorocarbon film in relation to CH4/C4F8 ratio and substrate temperature is a paper indexed in ScholarIQ from OpenAlex. ScholarIQ records 70 citations, 2000 year and closed oa status.
70
Citations
2000
Year
closed
OA Status