Advanced Surface Polishing Techniques
Advanced Surface Polishing Techniques is a topic indexed in ScholarIQ from OpenAlex.
What is known about Advanced Surface Polishing Techniques?
This cluster of papers focuses on the techniques, mechanisms, and simulations related to chemical mechanical polishing (CMP) in the context of microelectronics manufacturing. It covers topics such as material removal mechanisms, molecular dynamics simulation, ultra-precision grinding, surface and subsurface damage, nanometric cutting, magnetorheological finishing, polishing slurry chemistry, and tool wear.
How many works does Advanced Surface Polishing Techniques have?
Advanced Surface Polishing Techniques has 81,790 works in the ScholarIQ index. The count is the OpenAlex total, not the number of papers listed on this page.
How many citations does Advanced Surface Polishing Techniques have?
Advanced Surface Polishing Techniques has 575,410 citations in the OpenAlex counts ScholarIQ stores.
What is the OpenAlex record for Advanced Surface Polishing Techniques?
The OpenAlex for Advanced Surface Polishing Techniques is on the source record.