Plasma Diagnostics and Applications
Plasma Diagnostics and Applications is a topic indexed in ScholarIQ from OpenAlex.
What is known about Plasma Diagnostics and Applications?
This cluster of papers covers a wide range of topics related to plasma physics and its applications in the semiconductor industry, including plasma etching techniques, atomic layer etching, Hall thrusters for spacecraft propulsion, electron energy distribution function measurements, and ion-molecule collisions. It also explores the use of plasmas in electric propulsion for satellites and spacecraft.
How many works does Plasma Diagnostics and Applications have?
Plasma Diagnostics and Applications has 981,590 works in the ScholarIQ index. The count is the OpenAlex total, not the number of papers listed on this page.
How many citations does Plasma Diagnostics and Applications have?
Plasma Diagnostics and Applications has 903,855 citations in the OpenAlex counts ScholarIQ stores.
What is the OpenAlex record for Plasma Diagnostics and Applications?
The OpenAlex for Plasma Diagnostics and Applications is on the source record.