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Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
JournalCitation impact & published research
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena is a journal indexed in ScholarIQ from OpenAlex.
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What are the most-cited papers on Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena?
ScholarIQmost cited works
Sub-10 nm electron beam lithography using cold development of poly(methylmethacrylate)
Walter Hu, K. Sarveswaran, Marya Lieberman, Gary H. Bernstein