Sub-10 nm electron beam lithography using cold development of poly(methylmethacrylate)

Sub-10 nm electron beam lithography using cold development of poly(methylmethacrylate) is a paper indexed in ScholarIQ from OpenAlex.

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Sub-10 nm electron beam lithography using cold development of poly(methylmethacrylate) has 240 citations in the OpenAlex counts ScholarIQ stores.

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Sub-10 nm electron beam lithography using cold development of poly(methylmethacrylate) has 2004 year in the ScholarIQ index.

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