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Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
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Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena is a journal indexed in ScholarIQ from OpenAlex.
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What are the most-cited papers on Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena?
ScholarIQmost cited works
Ultraviolet curable branched siloxanes as low-k dielectrics for imprint lithography
Tsuyoshi Ogawa, Satoshi Takei, C. Grant Willson