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Ultraviolet curable branched siloxanes as low-k dielectrics for imprint lithography
PaperCitations, authors & open-access status
Ultraviolet curable branched siloxanes as low-k dielectrics for imprint lithography is a paper indexed in ScholarIQ from OpenAlex. ScholarIQ records 16 citations, 2012 year and closed oa status.
16
Citations
2012
Year
closed
OA Status