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A Convolutional Neural Network for Fault Classification and Diagnosis in Semiconductor Manufacturing Processes
PaperCitations, authors & open-access status
A Convolutional Neural Network for Fault Classification and Diagnosis in Semiconductor Manufacturing Processes is a paper indexed in ScholarIQ from OpenAlex. ScholarIQ records 477 citations, 2017 year and closed oa status.
477
Citations
2017
Year
closed
OA Status