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A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow
PaperCitations, authors & open-access status
A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow is a paper indexed in ScholarIQ from OpenAlex. ScholarIQ records 89 citations, 2019 year and closed oa status.
89
Citations
2019
Year
closed
OA Status