A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow
A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow is a paper indexed in ScholarIQ from OpenAlex.
How many citations does A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow have?
A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow has 89 citations in the OpenAlex counts ScholarIQ stores.
When was A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow published?
A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow has 2019 year in the ScholarIQ index.
What is the open-access status of A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow?
A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow has closed oa status in the ScholarIQ index.
What is the DOI of A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow?
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