ScholarIQanswers from OpenAlex
Advanced Surface Polishing Techniques
TopicLeading institutions, researchers & key papers
Advanced Surface Polishing Techniques is a topic indexed in ScholarIQ from OpenAlex.
What is known about Advanced Surface Polishing Techniques?
ScholarIQrecord summary
This cluster of papers focuses on the techniques, mechanisms, and simulations related to chemical mechanical polishing (CMP) in the context of microelectronics manufacturing. It covers topics such as material removal mechanisms, molecular dynamics simulation, ultra-precision grinding, surface and subsurface damage, nanometric cutting, magnetorheological finishing, polishing slurry chemistry, and tool wear.
How many works does Advanced Surface Polishing Techniques have?
ScholarIQindexed works
Advanced Surface Polishing Techniques has 124 works in the ScholarIQ index. The count is the OpenAlex total, not the number of papers listed on this page.
What is the OpenAlex record for Advanced Surface Polishing Techniques?
ScholarIQopenalex
The OpenAlex for Advanced Surface Polishing Techniques is on the source record.
What are the most-cited papers on Advanced Surface Polishing Techniques?
ScholarIQmost cited works
Influence of microstructure on the cutting behaviour of silicon
Saurav Goel, A. M. Kovalchenko, Alexander Stukowski, Graham L. W. Cross
Some recent developments in mechanical activation and mechanosynthesis
Éric Gaffet, Frédéric Bernard, J.C. Niepce, F. Charlot, Christophe Gras, G. Le Caër, J.L. Guichard, P. Delcroix, Alain Mocellin, Olivier Tillement
Contact Mechanics and Lubrication Hydrodynamics of Chemical Mechanical Polishing
John Tichy, Joseph A. Levert, Lei Shan, S. Danyluk
Rapid characterization and modeling of pattern-dependent variation in chemical-mechanical polishing
B.E. Stine, Dennis O. Ouma, R. Divecha, Duane S. Boning, J.E. Chung, Dale L. Hetherington, C.R. Harwoo, O.S. Nakagawa, Soo‐Young Oh
Micro machining glass with polycrystalline diamond tools shaped by micro electro discharge machining
Chris Morgan, R. Ryan Vallance, Eric R. Marsh
Where is Advanced Surface Polishing Techniques research published, and who funds it?
ScholarIQvenues & funding sources
TOP JOURNALS
TOP FUNDERS
National Science Foundation—
NIH—
Wellcome Trust—
European Research Council—
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How much of the research on Advanced Surface Polishing Techniques is open access?
ScholarIQopen access share
13%OPEN ACCESS