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Contact Mechanics and Lubrication Hydrodynamics of Chemical Mechanical Polishing
PaperCitations, authors & open-access status
Contact Mechanics and Lubrication Hydrodynamics of Chemical Mechanical Polishing is a paper indexed in ScholarIQ from OpenAlex. ScholarIQ records 152 citations, 1999 year and bronze oa status.
152
Citations
1999
Year
bronze
OA Status