ScholarIQanswers from OpenAlex
Data-Driven Adaptive Virtual Metrology for Yield Prediction in Multibatch Wafers
PaperCitations, authors & open-access status
Data-Driven Adaptive Virtual Metrology for Yield Prediction in Multibatch Wafers is a paper indexed in ScholarIQ from OpenAlex.
How many citations does Data-Driven Adaptive Virtual Metrology for Yield Prediction in Multibatch Wafers have?
ScholarIQcitation count
Data-Driven Adaptive Virtual Metrology for Yield Prediction in Multibatch Wafers has 38 citations in the OpenAlex counts ScholarIQ stores.
When was Data-Driven Adaptive Virtual Metrology for Yield Prediction in Multibatch Wafers published?
ScholarIQyear
Data-Driven Adaptive Virtual Metrology for Yield Prediction in Multibatch Wafers has 2022 year in the ScholarIQ index.
What is the open-access status of Data-Driven Adaptive Virtual Metrology for Yield Prediction in Multibatch Wafers?
ScholarIQoa status
Data-Driven Adaptive Virtual Metrology for Yield Prediction in Multibatch Wafers has closed oa status in the ScholarIQ index.
What is the DOI of Data-Driven Adaptive Virtual Metrology for Yield Prediction in Multibatch Wafers?
ScholarIQdoi
The DOI for Data-Driven Adaptive Virtual Metrology for Yield Prediction in Multibatch Wafers is on the source record.
What is the OpenAlex record for Data-Driven Adaptive Virtual Metrology for Yield Prediction in Multibatch Wafers?
ScholarIQopenalex
The OpenAlex for Data-Driven Adaptive Virtual Metrology for Yield Prediction in Multibatch Wafers is on the source record.