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Diagnostics of a Multicusp-Assisted Inductively-Coupled Radio-Frequency Plasma Source for Plasma Immersion Ion Implantation
PaperCitations, authors & open-access status
Diagnostics of a Multicusp-Assisted Inductively-Coupled Radio-Frequency Plasma Source for Plasma Immersion Ion Implantation is a paper indexed in ScholarIQ from OpenAlex. ScholarIQ records 0 citations, 2026 year and green oa status.
0
Citations
2026
Year
green
OA Status
IDs:OpenAlex