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Plasma Diagnostics and Applications
TopicLeading institutions, researchers & key papers
This cluster of papers covers a wide range of topics related to plasma physics and its applications in the semiconductor industry, including plasma etching techniques, atomic layer etching, Hall thrusters for spacecraft propulsion, electron energy distribution function measurements, and ion-molecule collisions. It also explores the use of plasmas in electric propulsion for satellites and spacecraft.
16
Works
IDs:OpenAlex
How has Plasma Diagnostics and Applications's publication output changed over time?
ScholarIQpublication output · 2002–2026
Output grew100% over the shown period — from 1 works in 2002 to 2 in 2026.
1
1
2
2
2002202120242026
What are the most-cited papers on Plasma Diagnostics and Applications?
ScholarIQmost cited works
Model for a multiple-step deep Si etch process
Shahid Rauf, William J. Dauksher, Stephen Clemens, Kenneth H. Smith
S4210190837. 200252 Citations
Development of an Undergraduate DC-Discharge Ring-Cusp Miniature Gridded Ion Thruster
Ishaan Mishra, Timothy Ausec, H. Onur Dorduncu, Adam Jirovec, Justin Lin, Miguel Vásquez, Ben Mertz
20243 Citations
In-Situ Diagnostic of Channel Erosion in Hall Thrusters
Ivan Romadanov, Ishaan Mishra, Jacob Kiviat, Sung Hyun Son, Benjamin Benjadol, Angelica Ottaviano, Yevgeny Raitses, Michael Keidar
20242 Citations
Diagnostics of a Multicusp-Assisted Inductively-Coupled Radio-Frequency Plasma Source for Plasma Immersion Ion Implantation
M. E. Joël, J. Telen Marilyn, O. Daniel, Bradley Michael P., Couëdel Lénaïc
S4306402512. 20260 CitationsOPEN ACCESS
Where is Plasma Diagnostics and Applications research published, and who funds it?
ScholarIQvenues & funding sources
TOP JOURNALS
TOP FUNDERS
National Science Foundation—
NIH—
Wellcome Trust—
European Research Council—
Funder breakdown is a member featureSign up free to unlock
How much of the research on Plasma Diagnostics and Applications is open access?
ScholarIQopen access share
50%OPEN ACCESS
Gold
0%
Green
33%
Hybrid
17%
Bronze
0%
Closed
50%
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