ScholarIQanswers from OpenAlex
Plasma Diagnostics and Applications
TopicLeading institutions, researchers & key papers
Plasma Diagnostics and Applications is a topic indexed in ScholarIQ from OpenAlex.
What is known about Plasma Diagnostics and Applications?
ScholarIQrecord summary
This cluster of papers covers a wide range of topics related to plasma physics and its applications in the semiconductor industry, including plasma etching techniques, atomic layer etching, Hall thrusters for spacecraft propulsion, electron energy distribution function measurements, and ion-molecule collisions. It also explores the use of plasmas in electric propulsion for satellites and spacecraft.
How many works does Plasma Diagnostics and Applications have?
ScholarIQindexed works
Plasma Diagnostics and Applications has 16 works in the ScholarIQ index. The count is the OpenAlex total, not the number of papers listed on this page.
What is the OpenAlex record for Plasma Diagnostics and Applications?
ScholarIQopenalex
The OpenAlex for Plasma Diagnostics and Applications is on the source record.
What are the most-cited papers on Plasma Diagnostics and Applications?
ScholarIQmost cited works
Model for a multiple-step deep Si etch process
Shahid Rauf, William J. Dauksher, Stephen Clemens, Kenneth H. Smith
Development of an Undergraduate DC-Discharge Ring-Cusp Miniature Gridded Ion Thruster
Ishaan Mishra, Timothy Ausec, H. Onur Dorduncu, Adam Jirovec, Justin Lin, Miguel Vásquez, Ben Mertz
In-Situ Diagnostic of Channel Erosion in Hall Thrusters
Ivan Romadanov, Ishaan Mishra, Jacob Kiviat, Sung Hyun Son, Benjamin Benjadol, Angelica Ottaviano, Yevgeny Raitses, Michael Keidar
Thruster Particle-in-Cell Simulation
Ishaan Mishra
Diagnostics of a Multicusp-Assisted Inductively-Coupled Radio-Frequency Plasma Source for Plasma Immersion Ion Implantation
M. E. Joël, J. Telen Marilyn, O. Daniel, Bradley Michael P., Couëdel Lénaïc
Where is Plasma Diagnostics and Applications research published, and who funds it?
ScholarIQvenues & funding sources
TOP JOURNALS
TOP FUNDERS
National Science Foundation—
NIH—
Wellcome Trust—
European Research Council—
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How much of the research on Plasma Diagnostics and Applications is open access?
ScholarIQopen access share
50%OPEN ACCESS