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Field emission of nanostructured amorphous SiCN films deposited by reactive magnetron sputtering of SiC in CH4/N2 atmosphere
PaperCitations, authors & open-access status
Field emission of nanostructured amorphous SiCN films deposited by reactive magnetron sputtering of SiC in CH4/N2 atmosphere is a paper indexed in ScholarIQ from OpenAlex. ScholarIQ records 25 citations, 2002 year and closed oa status.
25
Citations
2002
Year
closed
OA Status