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Semiconductor materials and devices
TopicLeading institutions, researchers & key papers
This cluster of papers focuses on the advances in atomic layer deposition (ALD) technology, particularly in the context of high-k dielectrics, gate oxides, and semiconductor devices. It covers topics such as thin film growth, dielectric breakdown mechanisms, metal gate transistors, interface engineering, and the impact of negative bias temperature instability (NBTI) degradation on device performance.
79
Works
IDs:OpenAlex
How has Semiconductor materials and devices's publication output changed over time?
ScholarIQpublication output · 2003–2016
Output grew0% over the shown period — from 1 works in 2003 to 1 in 2016.
1
1
1
1
1
1
3
1
1
1
2003200420072009201020112013201420152016
What are the most-cited papers on Semiconductor materials and devices?
ScholarIQmost cited works
Pinpoint and bulk electrochemical reduction of insulating silicon dioxide to silicon
Toshiyuki Nohira, Kouji Yasuda, Yasuhiko Ito
S103895331. 2003410 Citations
Sub-10 nm electron beam lithography using cold development of poly(methylmethacrylate)
Walter Hu, K. Sarveswaran, Marya Lieberman, Gary H. Bernstein
S4210169477. 2004240 Citations
Mechanisms and reactions during atomic layer deposition on polymers
Gregory N. Parsons, Sarah E. Atanasov, Erinn C. Dandley, Christina K. Devine, Bo Gong, Jesse S. Jur, Kyoung-Mi Lee, Christopher J. Oldham, Qing Peng, Joseph C. Spagnola, Philip S. Williams
S117186765. 2013214 Citations
Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion
Oili Ylivaara, Xuwen Liu, Lauri Kilpi, Jussi Lyytinen, Dieter Schneider, Mikko Laitinen, Jaakko Julin, Saima Ali, Sakari Sintonen, Maria Berdova, Eero Haimi, Timo Sajavaara, Helena Ronkainen, Harri Lipsanen, Jari Koskinen, Simo‐Pekka Hannula, Riikka L. Puurunen
S84339699. 2013189 Citations
An XPS study of Au alloyed Al–O sputtered coatings
N.M. Figueiredo, N.J.M. Carvalho, A. Cavaleiro
S42323631. 2011155 CitationsOPEN ACCESS
Where is Semiconductor materials and devices research published, and who funds it?
ScholarIQvenues & funding sources
TOP JOURNALS
S103895331410
S84339699267
S4210169477240
S117186765214
S42323631155
TOP FUNDERS
National Science Foundation—
NIH—
Wellcome Trust—
European Research Council—
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How much of the research on Semiconductor materials and devices is open access?
ScholarIQopen access share
20%OPEN ACCESS
Gold
0%
Green
7%
Hybrid
0%
Bronze
13%
Closed
80%
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