ScholarIQanswers from OpenAlex
Semiconductor materials and devices
TopicLeading institutions, researchers & key papers
Semiconductor materials and devices is a topic indexed in ScholarIQ from OpenAlex.
What is known about Semiconductor materials and devices?
ScholarIQrecord summary
This cluster of papers focuses on the advances in atomic layer deposition (ALD) technology, particularly in the context of high-k dielectrics, gate oxides, and semiconductor devices. It covers topics such as thin film growth, dielectric breakdown mechanisms, metal gate transistors, interface engineering, and the impact of negative bias temperature instability (NBTI) degradation on device performance.
How many works does Semiconductor materials and devices have?
ScholarIQindexed works
Semiconductor materials and devices has 79 works in the ScholarIQ index. The count is the OpenAlex total, not the number of papers listed on this page.
What is the OpenAlex record for Semiconductor materials and devices?
ScholarIQopenalex
The OpenAlex for Semiconductor materials and devices is on the source record.
What are the most-cited papers on Semiconductor materials and devices?
ScholarIQmost cited works
Pinpoint and bulk electrochemical reduction of insulating silicon dioxide to silicon
Toshiyuki Nohira, Kouji Yasuda, Yasuhiko Ito
Sub-10 nm electron beam lithography using cold development of poly(methylmethacrylate)
Walter Hu, K. Sarveswaran, Marya Lieberman, Gary H. Bernstein
Mechanisms and reactions during atomic layer deposition on polymers
Gregory N. Parsons, Sarah E. Atanasov, Erinn C. Dandley, Christina K. Devine, Bo Gong, Jesse S. Jur, Kyoung-Mi Lee, Christopher J. Oldham, Qing Peng, Joseph C. Spagnola, Philip S. Williams
Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion
Oili Ylivaara, Xuwen Liu, Lauri Kilpi, Jussi Lyytinen, Dieter Schneider, Mikko Laitinen, Jaakko Julin, Saima Ali, Sakari Sintonen, Maria Berdova, Eero Haimi, Timo Sajavaara, Helena Ronkainen, Harri Lipsanen, Jari Koskinen, Simo‐Pekka Hannula, Riikka L. Puurunen
An XPS study of Au alloyed Al–O sputtered coatings
N.M. Figueiredo, N.J.M. Carvalho, A. Cavaleiro
Where is Semiconductor materials and devices research published, and who funds it?
ScholarIQvenues & funding sources
TOP JOURNALS
TOP FUNDERS
National Science Foundation—
NIH—
Wellcome Trust—
European Research Council—
Funder breakdown is a member featureSign up free to unlock
How much of the research on Semiconductor materials and devices is open access?
ScholarIQopen access share
20%OPEN ACCESS