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Interfacial Fluid Mechanics and Pressure Prediction in Chemical Mechanical Polishing
PaperCitations, authors & open-access status
Interfacial Fluid Mechanics and Pressure Prediction in Chemical Mechanical Polishing is a paper indexed in ScholarIQ from OpenAlex. ScholarIQ records 90 citations, 1999 year and closed oa status.
90
Citations
1999
Year
closed
OA Status