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Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques

PaperCitations, authors & open-access status

Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques is a paper indexed in ScholarIQ from OpenAlex. ScholarIQ records 54 citations, 2013 year and closed oa status.

54
Citations
2013
Year
closed
OA Status

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