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Microscratch testing method for systematic evaluation of the adhesion of atomic layer deposited thin films on silicon
PaperCitations, authors & open-access status
Microscratch testing method for systematic evaluation of the adhesion of atomic layer deposited thin films on silicon is a paper indexed in ScholarIQ from OpenAlex. ScholarIQ records 35 citations, 2015 year and bronze oa status.
35
Citations
2015
Year
bronze
OA Status