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Molecular dynamics study on the effects of stamp shape, adhesive energy, and temperature on the nanoimprint lithography process
PaperCitations, authors & open-access status
Molecular dynamics study on the effects of stamp shape, adhesive energy, and temperature on the nanoimprint lithography process is a paper indexed in ScholarIQ from OpenAlex. ScholarIQ records 53 citations, 2010 year and closed oa status.
53
Citations
2010
Year
closed
OA Status