Upload Records Snowball Search Search OpenAlex
About the database ScholarIQanswers from OpenAlex
Advancements in Photolithography Techniques
TopicLeading institutions, researchers & key papers
This cluster of papers focuses on electron beam lithography, nanofabrication, and resolution limits in lithography techniques. It explores the applications of extreme ultraviolet lithography, chemically amplified resists, and high-resolution patterning materials. The cluster also discusses the challenges related to line edge roughness and mask design in nanolithography.
15
Works
IDs:OpenAlex
How has Advancements in Photolithography Techniques's publication output changed over time?
ScholarIQpublication output · 2016–2018
Output grew100% over the shown period — from 1 works in 2016 to 2 in 2018.
1
2
20162018
What are the most-cited papers on Advancements in Photolithography Techniques?
ScholarIQmost cited works
EUV lithography performance for manufacturing: status and outlook
Alberto Pirati, Rudy Peeters, Daniel Smith, Sjoerd Lok, Martijn van Noordenburg, Roderik van Es, Eric Verhoeven, H.C. Meijer, Arthur Minnaert, Jan-Willem van der Horst, H. Meiling, Joerg Mallmann, Christian Wagner, Judon Stoeldraijer, Geert Fisser, Jo Finders, Carmen Zoldesi, Uwe Stamm, H.B.K. Boom, David C. Brandt, Daniel J. Brown, Igor V. Fomenkov, Michael Purvis
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE. 201690 Citations
EUV for HVM: towards an industrialized scanner for HVM NXE3400B performance update
Mark van de Kerkhof, Arthur Minnaert, Marco Pieters, H. Meiling, Joost Smits, Rudy Peeters, Roderik van Es, Geert Fisser, Jos W. de Klerk, Roel Moors, Eric Verhoeven, Leon Levasier
201844 Citations
Optimization of optical proximity correction to reduce mask write time using genetic algorithm
Gregory J. Dick, Abhishek Asthana, Liang Cao, Jing Cheng, David Power
20181 Citations
Where is Advancements in Photolithography Techniques research published, and who funds it?
ScholarIQvenues & funding sources
TOP JOURNALS
TOP FUNDERS
National Science Foundation—
NIH—
Wellcome Trust—
European Research Council—
Funder breakdown is a member featureSign up free to unlock
How much of the research on Advancements in Photolithography Techniques is open access?
ScholarIQopen access share
0%OPEN ACCESS
Gold
0%
Green
0%
Hybrid
0%
Bronze
0%
Closed
100%
Related on ScholarIQ
Convolutional Neural Network for Wafer Surface Defect Classification and the Detection of Unknown Defect Class
Paper
Sub-10 nm electron beam lithography using cold development of poly(methylmethacrylate)
Paper
Constraint-based watermarking techniques for design IP protection
Paper
EUV lithography performance for manufacturing: status and outlook
Paper
Molecular dynamics study on the effects of stamp shape, adhesive energy, and temperature on the nanoimprint lithography process
Paper
EUV for HVM: towards an industrialized scanner for HVM NXE3400B performance update
Paper