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Advancements in Photolithography Techniques
TopicLeading institutions, researchers & key papers
Advancements in Photolithography Techniques is a topic indexed in ScholarIQ from OpenAlex.
What is known about Advancements in Photolithography Techniques?
ScholarIQrecord summary
This cluster of papers focuses on electron beam lithography, nanofabrication, and resolution limits in lithography techniques. It explores the applications of extreme ultraviolet lithography, chemically amplified resists, and high-resolution patterning materials. The cluster also discusses the challenges related to line edge roughness and mask design in nanolithography.
How many works does Advancements in Photolithography Techniques have?
ScholarIQindexed works
Advancements in Photolithography Techniques has 15 works in the ScholarIQ index. The count is the OpenAlex total, not the number of papers listed on this page.
What is the OpenAlex record for Advancements in Photolithography Techniques?
ScholarIQopenalex
The OpenAlex for Advancements in Photolithography Techniques is on the source record.
What are the most-cited papers on Advancements in Photolithography Techniques?
ScholarIQmost cited works
EUV lithography performance for manufacturing: status and outlook
Alberto Pirati, Rudy Peeters, Daniel Smith, Sjoerd Lok, Martijn van Noordenburg, Roderik van Es, Eric Verhoeven, H.C. Meijer, Arthur Minnaert, Jan-Willem van der Horst, H. Meiling, Joerg Mallmann, Christian Wagner, Judon Stoeldraijer, Geert Fisser, Jo Finders, Carmen Zoldesi, Uwe Stamm, H.B.K. Boom, David C. Brandt, Daniel J. Brown, Igor V. Fomenkov, Michael Purvis
EUV for HVM: towards an industrialized scanner for HVM NXE3400B performance update
Mark van de Kerkhof, Arthur Minnaert, Marco Pieters, H. Meiling, Joost Smits, Rudy Peeters, Roderik van Es, Geert Fisser, Jos W. de Klerk, Roel Moors, Eric Verhoeven, Leon Levasier
Optimization of optical proximity correction to reduce mask write time using genetic algorithm
Gregory J. Dick, Abhishek Asthana, Liang Cao, Jing Cheng, David Power
Where is Advancements in Photolithography Techniques research published, and who funds it?
ScholarIQvenues & funding sources
TOP JOURNALS
TOP FUNDERS
National Science Foundation—
NIH—
Wellcome Trust—
European Research Council—
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How much of the research on Advancements in Photolithography Techniques is open access?
ScholarIQopen access share
0%OPEN ACCESS