ScholarIQanswers from OpenAlex
Quality and exposure control in semiconductor manufacturing. Part I: Modelling
PaperCitations, authors & open-access status
Quality and exposure control in semiconductor manufacturing. Part I: Modelling is a paper indexed in ScholarIQ from OpenAlex.
How many citations does Quality and exposure control in semiconductor manufacturing. Part I: Modelling have?
ScholarIQcitation count
Quality and exposure control in semiconductor manufacturing. Part I: Modelling has 20 citations in the OpenAlex counts ScholarIQ stores.
When was Quality and exposure control in semiconductor manufacturing. Part I: Modelling published?
ScholarIQyear
Quality and exposure control in semiconductor manufacturing. Part I: Modelling has 2011 year in the ScholarIQ index.
What is the open-access status of Quality and exposure control in semiconductor manufacturing. Part I: Modelling?
ScholarIQoa status
Quality and exposure control in semiconductor manufacturing. Part I: Modelling has closed oa status in the ScholarIQ index.
What is the DOI of Quality and exposure control in semiconductor manufacturing. Part I: Modelling?
ScholarIQdoi
The DOI for Quality and exposure control in semiconductor manufacturing. Part I: Modelling is on the source record.
What is the OpenAlex record for Quality and exposure control in semiconductor manufacturing. Part I: Modelling?
ScholarIQopenalex
The OpenAlex for Quality and exposure control in semiconductor manufacturing. Part I: Modelling is on the source record.