Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process

Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process is a paper indexed in ScholarIQ from OpenAlex.

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Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process has 71 citations in the OpenAlex counts ScholarIQ stores.

When was Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process published?

Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process has 2018 year in the ScholarIQ index.

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Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process has closed oa status in the ScholarIQ index.

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