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Understanding Surface Treatment and ALD AlOx Thickness Induced Surface Passivation Quality of c-Si Cz Wafers

PaperCitations, authors & open-access status

Understanding Surface Treatment and ALD AlOx Thickness Induced Surface Passivation Quality of c-Si Cz Wafers is a paper indexed in ScholarIQ from OpenAlex. ScholarIQ records 43 citations, 2017 year and closed oa status.

43
Citations
2017
Year
closed
OA Status

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Xin Zheng
Author
Engineering
Topic
Semiconductor materials and interfaces
Topic
Semiconductor materials and devices
Topic
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